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- ISHII Shigeyuki
- The Institute of Physical and Chemical Research
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- ISHIBE Yukio
- The Institute of Physical and Chemical Research
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- OYAMA Hitoshi
- The Institute of Physical and Chemical Research
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- OKAZAKI Kiyohiko
- The Institute of Physical and Chemical Research
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- SAKAMOTO Yuichi
- The Institute of Physical and Chemical Research
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- YANO Katsuki
- The Institute of Physical and Chemical Research
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- KAWAHATA Kazuo
- Institute of Plasma Physics, Nagoya University
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- KAWASUMI Yoshiaki
- Institute of Plasma Physics, Nagoya University
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- TANAHASHI Shugo
- Institute of Plasma Physics, Nagoya University
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- NODA Nobuaki
- Institute of Plasma Physics, Nagoya University
Bibliographic Information
- Other Title
-
- JIPP T-IIにおけるECR放電洗浄の効果
- JIPP T 2 ニ オケル ECR ホウデン センジョウ ノ コウカ
Search this article
Journal
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- Shinku
-
Shinku 25 (4), 168-171, 1982
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
-
- CRID
- 1390282679044482176
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- NII Article ID
- 130000865934
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 2447740
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- Data Source
-
- JaLC
- NDL
- Crossref
- CiNii Articles
