Self-Organized Formation of Cellular Structure on Semiconductors by Ion-Implantation
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- Nitta Noriko
- Department of Environmental Systems Engineering, Kochi University of Technology
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- Taniwaki Masafumi
- Department of Environmental Systems Engineering, Kochi University of Technology
Bibliographic Information
- Other Title
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- イオン照射による半導体微細セル構造の自己組織化形成
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Journal
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- Materia Japan
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Materia Japan 43 (12), 1014-1014, 2004
The Japan Institute of Metals and Materials
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Details 詳細情報について
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- CRID
- 1390282679055562880
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- NII Article ID
- 10014238976
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- NII Book ID
- AN10433227
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- ISSN
- 18845843
- 13402625
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
- KAKEN
- OpenAIRE