Self-Organized Formation of Cellular Structure on Semiconductors by Ion-Implantation

  • Nitta Noriko
    Department of Environmental Systems Engineering, Kochi University of Technology
  • Taniwaki Masafumi
    Department of Environmental Systems Engineering, Kochi University of Technology

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Other Title
  • イオン照射による半導体微細セル構造の自己組織化形成

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Journal

  • Materia Japan

    Materia Japan 43 (12), 1014-1014, 2004

    The Japan Institute of Metals and Materials

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