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- OKUDAIRA Sadayuki
- Central Research Laboratory, Hitachi Ltd.
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- SHIMOMOTO Yasuharu
- Central Research Laboratory, Hitachi Ltd.
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- KAWAMOTO Yoshifumi
- Central Research Laboratory, Hitachi Ltd.
Bibliographic Information
- Other Title
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- ドライエッチング法
- ドライ エッチングホウ
Search this article
Journal
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- Journal of the Metal Finishing Society of Japan
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Journal of the Metal Finishing Society of Japan 30 (10), 508-517, 1979
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390282679089206528
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- NII Article ID
- 130003809804
- 40000775921
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- NII Book ID
- AN00064951
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- COI
- 1:CAS:528:DyaL3cXpsl2m
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- ISSN
- 18843395
- 00260614
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- NDL BIB ID
- 2065814
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
