２１世紀を支える表面技術　　高アスペクト比を有する電析Ｎｉマイクロプローブの試作

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タイトル別名
  • Surface Technology for the 21st Century. Fabrication of Electrodeposited Ni Microprobes with a High Aspect Ratio.
  • コウアスペクトヒ オ ユウスル デンセキNi マイクロプローブ ノ シサク

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抄録

The effects of organic additives in a Ni sulfamate bath were investigated in order to form microprobes with a high aspect ratio. Results without the usage of additives confirmed that Ni deposits have a low aspect ratio because of in-plain spread. With the addition of propargyl alcohol, however, the form of Ni deposit changes from a flat to an oval shape. The surface morphology improved with the addition of sodium salt of saccharin, but the probe shape was flattened. Finally, the addition of PEG-4000 to a bath containing propargyl alcohol and saccharin produced probes with a fine, smooth surface and a high aspect ratio. Thus, results confirmed that satisfactory probes could be obtained with Ni electrodeposition.

収録刊行物

  • 表面技術

    表面技術 52 (1), 130-134, 2001

    一般社団法人 表面技術協会

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