Vacuum Equipment and Application for Thin Film in the Multimedia. ULSI Interconnect Technology Trend.
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- UENO Kazuyoshi
- ULSI Device Development Labs., NEC Corp.
Bibliographic Information
- Other Title
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- マルチメディア時代における真空装置と薄膜応用 ＵＬＳＩ配線技術の動向
- ULSI ハイセン ギジュツ ノ ドウコウ
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Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 48 (11), 1050-1053, 1997
The Surface Finishing Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679092616192
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- NII Article ID
- 10002260127
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- NII Book ID
- AN1005202X
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- ISSN
- 18843409
- 09151869
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- NDL BIB ID
- 4334590
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
