MEMS Industrialization and Micro-Nano Fusion
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- HIRANO Takayuki
- Micromashine Center
Bibliographic Information
- Other Title
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- ＭＥＭＳの現状と将来展望 ＭＥＭＳの産業化とナノテクとの融合
- MEMSの産業化とナノテクとの融合
- MEMS ノ サンギョウカ ト ナノテク ト ノ ユウゴウ
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Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 54 (10), 630-634, 2003
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390282679094376448
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- NII Article ID
- 10012452673
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- NII Book ID
- AN1005202X
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- ISSN
- 18843409
- 09151869
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- NDL BIB ID
- 6741627
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles