Controlling Oxygen Content by Varying Oxygen Partial Pressure in Chromium Oxynitride Thin Films Prepared by Pulsed Laser Deposition
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- Suzuki Kazuma
- Extreme Energy-Density Research Institute, Nagaoka University of Technology
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- Endo Toshiyuki
- Extreme Energy-Density Research Institute, Nagaoka University of Technology
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- Fukushima Teruhisa
- Extreme Energy-Density Research Institute, Nagaoka University of Technology
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- Sato Aoi
- Extreme Energy-Density Research Institute, Nagaoka University of Technology
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- Suzuki Tsuneo
- Extreme Energy-Density Research Institute, Nagaoka University of Technology
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- Nakayama Tadachika
- Extreme Energy-Density Research Institute, Nagaoka University of Technology
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- Suematsu Hisayuki
- Extreme Energy-Density Research Institute, Nagaoka University of Technology
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- Niihara Koichi
- Extreme Energy-Density Research Institute, Nagaoka University of Technology
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Abstract
Chromium oxynitride Cr(N,O) thin films were prepared by pulsed laser deposition in a highly reactive atmosphere, which consisted of pure oxygen gas and nitrogen plasma from a radio-frequency radical source. In order to control the oxygen content in the thin films, oxygen partial pressure (PO<sub>2</sub>) in the chamber was varied from 5 to 10 × 10−5 Pa under a fixed total pressure of 1.5 × 10−2 Pa. The thin films were then characterized by X-ray diffraction, infrared spectroscopy, electron energy loss spectroscopy and nano-indentation testing. It was found that the oxygen content of the thin films changed from 0 to 62 mol% with increasing PO<sub>2</sub>. The thin films with only the NaCl-type (B1) Cr(N,O) phase were prepared under PO<sub>2</sub> < 7.5 × 10−5 Pa. The chromium content of the B1 phase decreased from 47 mol%, which was close to the stoichiometric composition of CrN, to 40 mol% when the oxygen content was increased. The hardness increased up to 32 GPa with increasing PO<sub>2</sub> up to 7.5 × 10−5 Pa.
Journal
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- MATERIALS TRANSACTIONS
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MATERIALS TRANSACTIONS 54 (7), 1140-1144, 2013
The Japan Institute of Metals and Materials
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Details 詳細情報について
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- CRID
- 1390282679225598208
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- NII Article ID
- 10031183658
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- NII Book ID
- AA1151294X
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- COI
- 1:CAS:528:DC%2BC3sXhsVGjtrbL
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- ISSN
- 13475320
- 13459678
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- NDL BIB ID
- 024647548
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed