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- Mochizuki Amane
- Core Technology Center, Nitto Denko Co. Ltd.
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- Ueda Mitsuru
- Department of Organic and Polymeric Materials, Tokyo Institute of Technology
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抄録
Photosensitive polyimides (PSPIs) are attracting much attention as an insulating materials for microelectronic applications. PSPIs can be directly patterned, simplify processing steps and do not need a photoresist to be used in the micro-lithographic stage, nor a toxic etchant. This review introduces the recent development of PSPIs with emphasis placed on the chemistry responsible for images.
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 14 (5), 677-687, 2001
フォトポリマー学会
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詳細情報 詳細情報について
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- CRID
- 1390282679300516864
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- NII論文ID
- 130003488439
- 40005352093
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- NII書誌ID
- AA11576862
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- COI
- 1:CAS:528:DC%2BD38XitVCjtr8%3D
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- ISSN
- 13496336
- 09149244
- http://id.crossref.org/issn/09149244
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- NDL書誌ID
- 6042721
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可