Q-Mass Study on Cooperation Process of PCVD and Spattering for 1nm Thickness Semi-conductive C-Au-S Film

DOI Web Site Web Site 被引用文献1件 参考文献13件
  • Morita Shinzo
    Department of Electronics, Graduate School of Engineering, Nagoya University
  • Kashem Md. Abul
    Department of Electronics, Graduate School of Engineering, Nagoya University

この論文をさがす

抄録

Q-mass spectroscopic measurement confirmed a HF dissociation reaction and a C-Au-S molecule synthesis during cooperation process of plasma CVD and sputtering. Then the C-Au-S molecule was expected to compose conductive grains in C-Au-S films. The semi-conductive C-Au-S film at 1 nm thickness worked successfully in a PVDF ferroelectric electron emitter by a polarization inversion method. The chemical reactions in the cooperation plasma process were discussed.

収録刊行物

被引用文献 (1)*注記

もっと見る

参考文献 (13)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ