Dependence of the Deposition Rate on Probe-Substrate Separation in Nonadiabatic Near-Field Optical CVD
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- Kawazoe Tadashi
- Department of Electrical Engineering and Information Systems, Graduate School of Engineering, University of Tokyo
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- Ohtsu Motoichi
- Department of Electrical Engineering and Information Systems, Graduate School of Engineering, University of Tokyo
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Photochemical vapor deposition in the optical near field was employed to fabricate nanometric Zn dots on a sapphire substrate. A nonadiabatic photochemical process was used to excite molecular vibrational states in optically inactive zinc-bis(acetylacetonate) (Zn(acac)2) vapor. Dependence of the deposition rate on the separation distance, d, between the apex of the fiber probe and the substrate was investigated. At d > 5 nm, the dissociation rates of Zn(acac)2 decreased with increasing d due to the transition probability of ground-state Zn(acac)2 to excited vibrational states induced by the nonadiabatic photochemical process. At d < 5 nm, the deposition rate decreased with decreasing d, which was attributable to an insufficient supply of gaseous Zn(acac)2 molecules in the gap space between the fiber probe and the substrate.
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 21 (6), 741-745, 2008
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詳細情報 詳細情報について
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- CRID
- 1390282679302610816
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- NII論文ID
- 130004833240
- 40016406023
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- NII書誌ID
- AA11576862
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- COI
- 1:CAS:528:DC%2BD1MXhtVSkurs%3D
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 9756107
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可