Removal of Positive-tone Diazonaphthoquinone/Novolak Resist Using UV Laser lrradiation
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- Horibe Hideo
- Department of Materials Science and Engineering, Kochi National College of Technology
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- Kamiura Tomosumi
- Department of Electronics Information and Communication Engineering, Osaka Institute of Technology
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- Yoshida Kunio
- Department of Electronics Information and Communication Engineering, Osaka Institute of Technology
書誌事項
- タイトル別名
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- Removal of Positive-tone Diazonaphthoquinone/Novolak Resist Using UV Laser Irradiation
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This study developed a new method for removing positive-tone diazonaphtho- quinone/novolak resist. The fourth harmonic wave (&lamda;=266nm) of a pulse Nd3+:YAG laser was used. Ablation occurred at the resist surface when it was irradiated with over 35mJ/cm2. The amounr of removed resist increased with an increase in the laser energy, and it was possible to remove a 250nm thick resist layer by one pulse irradiation with 94mJ/cm2. Resist with an initial thickness of 1100nm and could be completely removed with no damage to the Si wafer after being irradiated seven times with 94mJ/cm2. The XPS measurement indicated that the residual amount of carbon from the Si surface irradiated by a laser under the vacuum was almost same to that from a Si wafer without resist coating. Resist removal method by laser is environmentally sound and will contribute to energy reduction.
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 18 (2), 181-185, 2005
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詳細情報 詳細情報について
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- CRID
- 1390282679302949504
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- NII論文ID
- 130004832999
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- NII書誌ID
- AA11576862
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- COI
- 1:CAS:528:DC%2BD2MXmtV2rt74%3D
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 7338357
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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