Adsorption of SO<sub>2</sub> Gas onto HDD Media in Cleanroom Environments

DOI Web Site 19 References
  • KOMATSU Akihiro
    Failure Analysis Department, Storage Product Division, Yamagata Fujitsu Ltd.
  • YAMAMOTO Jinzo
    Failure Analysis Department, Storage Product Division, Yamagata Fujitsu Ltd.
  • OGAWA Yuji
    Failure Analysis Department, Storage Product Division, Yamagata Fujitsu Ltd.
  • NAMIKI Norikazu
    Division of Material Engineering, Graduate School of Natural Science and Technology, Kanazawa University
  • OTANI Yoshio
    Division of Material Engineering, Graduate School of Natural Science and Technology, Kanazawa University
  • KAGI Naoki
    Department of Archtectural Hygiene and Housing, National Institute of Public Health

Bibliographic Information

Other Title
  • クリーンルーム環境におけるHDDディスク基板へのSO<sub>2</sub>ガスの吸着特性
  • クリーンルーム環境におけるHDDディスク基板へのSO2ガスの吸着特性
  • クリーンルーム カンキョウ ニ オケル HDD ディスク キバン エ ノ SO2 ガス ノ キュウチャク トクセイ

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Description

An increase in storage capacity of hard disk drives (HDDs) resulted in a reduction in flying height (clearance between hard disk (HD) and magnetic head) to be in the order of nanometer. The small flying height made the HDs more sensitive to the surface contamination, which very often led to fatal failures. The present work studied the HD surface contamination with SO2 by exposing lubricant-coated HDs to cleanroom (CR) air as well as to SO2-containing test air. As a result, the adsorption of SO2 in CR air was expressed by an adsorption kinetic equation based on Langmuir isotherm, while the equation was not applicable to the adsorption of SO2 in test air. The sticking probability of SO2 in test air onto the lubricated HD was found to be about one tenth of that for SO2 in CR. The difference may be attributed to the enhanced adsorption of SO2 by basic gases present in CR. This result suggests that SO2 adsorption onto HD surface should be evaluated by the exposure to CR air and that the data obtained by the exposure to model gas might be misleading. For the suppression of HD surface contamination by SO2, it is necessary to equip CR with an integrated air purification system for basic gases and SO2.

Journal

  • Earozoru Kenkyu

    Earozoru Kenkyu 20 (2), 153-159, 2005

    Japan Association of Aerosol Science and Technology

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