大型ガラス基板用ストッカ内の気流変動と汚染の対策に関する検討

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  • Countermeasure to the Airflow Fluctuation and the Contamination in Clean Stockers Used for Large-Scaled Glass Substrates
  • オオガタ ガラス キバンヨウ ストッカ ナイ ノ キリュウ ヘンドウ ト オセン ノ タイサク ニ カンスル ケントウ

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The purpose of this study is to characterize airflow fluctuation, which occurs by the motion of large transport vehicles, and to improve airflow environment in the cleanroom. 1/10-scale model was used for this study. This model has a rack area and a vehicle’s running area. The rack area is equipped with FFUs (Fan Filter Units) on sidewall and ceiling, and they provide airflow distribution from the rack area toward the vehicle’s area. The pressure at the boundary between these areas shows a steep change while the vehicle was moving across the measuring point, and it causes a counter flow which may bring contamination in the rack area. The airflow around the measuring point was visualized using laser light sheet and water mist, and flow at different FFU operation conditions were compared. Through these comparison the most desirable airflow condition was obtained.<br>

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