Removal Efficiency for Organic Compounds in Cleanroom Air by Air Washer at LCD Manufacturing Factory

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  • LCD工場向け循環空気用エアワッシャによる有機物の除去試験
  • LCD コウジョウ ムケ ジュンカン クウキヨウ エアワッシャ ニ ヨル ユウキブツ ノ ジョキョ シケン

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Description

Many organic compounds are present in cleanroom air of liquid crystal display (LCD) manufacturing factories, it is therefore important to remove organic compounds from the clean room air. The purpose of this study is to investigate the removal performances of air washer for monoethanolamine (MEA), acetic acid and dimethyl sulfoxide (DMSO), which are commonly found in the LCD cleanroom air. In the removal test for a single component, the removal efficiency of MEA by air washer was 57 % and that of acetic acid was 38 % at the washer water/air ratio (L/G) of 0.8. In the test with the mixed gas, the removal efficiency of MEA, acetic acid, and DMSO by the air washer and cooling coils was 95 %, 97 %, and 92 % respectively. In the case of an actual LCD cleanroom equipped with the air washer in circulation air conditioning units, the concentration of MEA, acetic acid, and DMSO is estimated to decrease to 9 %, 28 %, and 10 % of that without the air washer.

Journal

  • Earozoru Kenkyu

    Earozoru Kenkyu 17 (2), 89-95, 2002

    Japan Association of Aerosol Science and Technology

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