Study on Microfabrication of Polytetrafluoethylene using X-ray-induced Pyrochemical Anisotropic Etching

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  • Yamaguchi Akinobu
    Laboratory of Advanced Science and Technology for Industry, University of Hyogo
  • Kido Hideki
    Laboratory of Advanced Science and Technology for Industry, University of Hyogo
  • Takeuchi Masaya
    Laboratory of Advanced Science and Technology for Industry, University of Hyogo
  • Utsumi Yuichi
    Laboratory of Advanced Science and Technology for Industry, University of Hyogo

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  • X線を用いた熱化学異方性エッチングによるPTFEの微細加工プロセスの検討
  • Xセン オ モチイタ ネツ カガク イホウセイ エッチング ニ ヨル PTFE ノ ビサイ カコウ プロセス ノ ケントウ

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<p>We demonstrated microfabrication of polytetrafluoethylene (PTFE) using X-ray-induced pyrochemical anisotropic etching process. We found the scission of PTFE main polymer chain was induced by X-ray irradiation. The decrease of fragment length enabled pyrochemical etching because of decreasing the desorption temperature of scission fragment. Here, we can diminish the distortion of fabricated PTFE fine pattern in a large area using the pyrochemical anisotropic etching process. We also found the thermal exchange process and vapor pressure through a He gas can provide a clue to achieve the higher precision fabrication of PTFE.</p>

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