書誌事項
- タイトル別名
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- Investigation on the Hydrogen Gas Sensor Based on Exothermicity Reaction by Hydrogen Absorption into the Pd Film
- パラジウム ノ スイソ キュウゾウジ ノ ハツネツ ハンノウ オ リヨウ シタ スイソ ガスセンサ ノ ケントウ
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We have proposed a novel micro-calorimetric hydrogen sensor based on the temperature difference detection due to the exothermic reaction caused by hydrogen absorption in the palladium (Pd) thin film as a hydrogen absorbing material, and demonstrated using the prototype hydrogen sensor with a microheater and a pair of cantilever SOI thermocouples that this H2 sensor by this proposed mechanism is surely possible. We have ascertained that the sensor output voltage is increased as the H2 concentration is increased, that the exothermic reaction ceases after finish of the hydrogen absorption, the exothermic reaction by hydrogen absorption occurs even in pure N2 gas, that larger output voltage is observed for lower ambient temperature even under no oxygen gas, and that this hydrogen sensor does not respond to the CH4 gas. We have found that the detection of H2 concentration based on the exothermic reaction is preferred to carried out after heating the sensing region rather than during heating it especially in lower H2 concentration than about 5 vol.%, because we can use the null method to detect the extremely low H2 concentration.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 131 (4), 148-153, 2011
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679437098880
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- NII論文ID
- 10027980795
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 11066666
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 使用不可