Analysis of a Comb-Drive Actuator Taking the Depletion Layer into Consideration
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- Ueki Shinji
- BEANS Project 3D BEANS Center OMRON Corporation Core Technology Center
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- Nishimori Yuki
- Shizuoka University
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- Imamoto Hiroshi
- OMRON Corporation Core Technology Center
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- Kubota Tomohiro
- BEANS Project 3D BEANS Center The University of Tokyo
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- Sugiyama Masakazu
- BEANS Project 3D BEANS Center The University of Tokyo
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- Samukawa Seiji
- BEANS Project 3D BEANS Center Tohoku University
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- Hashiguchi Gen
- BEANS Project 3D BEANS Center Shizuoka University
Bibliographic Information
- Other Title
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- 半導体への電界の浸みこみを考慮した櫛歯アクチュエータの特性解析
- ハンドウタイ エ ノ デンカイ ノ シミコミ オ コウリョ シタ クシシ アクチュエータ ノ トクセイ カイセキ
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Abstract
We have analyzed the effect of penetration of the electric field into the semiconductor on the electrical and mechanical characteristics of comb-drive actuators. In this study we found two specific effects due to the depletion layer: (1) the electro-mechanical conversion factor is a function of the depletion layer and becomes smaller than that for the “ideal conductor” assumption, and (2) an additional stiffness appears in the mechanical system. Following the change in the electro-mechanical conversion factor, the resonance peak becomes lower than that of an ideal conductor. These effects are relatively small when the gap between the comb-fingers and the substrate is of the order of a micrometer. However if the gap is 0.1μm, the electro-mechanical conversion factor decreases by about 2.8%. In this analysis, we have taken only the depletion effect into account; however, for a more complete analysis we should also consider the surface traps induced by unpassivated surface bonds.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 130 (8), 388-393, 2010
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679437722496
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- NII Article ID
- 10026498222
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- NII Book ID
- AN1052634X
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- BIBCODE
- 2010IJTSM.130..388U
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 10765418
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed