Electrostatic Controlled Linear Inchworm Actuator
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- Konishi Satoshi
- Ritsumeikan University
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- Munechika Masaki
- Ritsumeikan University
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- Sawai Takuhiko
- Ritsumeikan University
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- Yoshifuji Kenji
- Ritsumeikan University
Bibliographic Information
- Other Title
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- 静電吸着制御型圧電駆動リニアアクチュエータ
- セイデンキュウチャク セイギョガタ アツデン クドウ リニアアクチュエータ
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Abstract
This paper describes Electrostatic Controlled Linear Inchworm Actuator (ECLIA) for advanced positioning. Besides accuracy, large stroke motion and high throughput become important to improve positioning efficiency. This paper presents ECLIA that can provide high accuracy (nm order) due to a piezoactuation, large stroke (mm order) through an inchworm motion, and high throughput of parallel motion of several actuators. Furthermore, vertical motion type of ECLIA is also designed and presented. Design, implementation and demonstration of a variety of ECLIA will be reported.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 122 (12), 560-566, 2002
The Institute of Electrical Engineers of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679438130944
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- NII Article ID
- 10010455252
- 130005403982
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 6368831
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed