書誌事項
- タイトル別名
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- Electrostatic Controlled Linear Inchworm Actuator
- セイデンキュウチャク セイギョガタ アツデン クドウ リニアアクチュエータ
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抄録
This paper describes Electrostatic Controlled Linear Inchworm Actuator (ECLIA) for advanced positioning. Besides accuracy, large stroke motion and high throughput become important to improve positioning efficiency. This paper presents ECLIA that can provide high accuracy (nm order) due to a piezoactuation, large stroke (mm order) through an inchworm motion, and high throughput of parallel motion of several actuators. Furthermore, vertical motion type of ECLIA is also designed and presented. Design, implementation and demonstration of a variety of ECLIA will be reported.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 122 (12), 560-566, 2002
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679438130944
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- NII論文ID
- 10010455252
- 130005403982
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 6368831
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可