Strain Sensors and Pressure Sensors using Cr-N Thin Films for High Pressure Hydrogen Gas

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  • 高圧水素ガス環境用Cr-N薄膜ひずみセンサおよび圧力センサ
  • コウアツ スイソ ガス カンキョウヨウ Cr-N ハクマクヒズミ センサ オヨビ アツリョク センサ

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Abstract

<p>The authors investigated the influence of hydrogen on Cr-N strain sensitive thin films, which have a gauge factor of about 14, to develop a high sensitive strain sensor for high pressure hydrogen gas. As a result, it was found that the thin film was not affected by hydrogen and the specimen of Cr-N thin film on Zirconia substrate showed a sensitive and linear output to the pressure. It was considered that the Cr-N thin films were able to be expected as not only high sensitive strain sensors but also diaphragm-less pressure sensors in high pressure hydrogen gas.</p>

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