EXAMPLES OF SILICON BASED MICROSYSTEMS
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- Rooij N. F. de
- Institute of Microtechnology, University of Neuchatel
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Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 115 (1), 7-9, 1995
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679438310144
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- NII Article ID
- 10001710062
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 3966813
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles