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- Sim Dong Youn
- Tohoku University
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- Kurabayashi Toru
- Tohoku University
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- Esashi Masayoshi
- Tohoku University
書誌事項
- タイトル別名
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- Pneumatic Microvalve Based on Silicon M
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抄録
A silicon microvalve to control fine gas flow was developed for advanced semiconductor fabrication processes. The valve is operated by a combination of pneumatic and electrostatic forces. It is composed of a glass-silicon-silicon-glass structure using silicon bulk micromachining. An anodically bonded glass-silicon combination is further bonded to another glass-silicon combination using Au-Si eutectic bonding. The structure has a built-in bias force for closing the valve normally. A polished silicon surface is utilized as a valve seat in order to decrease the gas leakage. The valve has corrugated diaphragms to increase maximum gas flow rate. The gas flow rate could be controlled from 0.1 sccm to 35 sccm at the the inlet pressure range of 0.13-0.66kgf/cm2. This microvalve can be used in the temperature range from 25 to 120°C.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 116 (2), 56-61, 1996
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679438346240
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- NII論文ID
- 130000771665
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 3954564
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可