Application of Vertical Comb-Drive MEMS Mirror for a Phase Shift Device
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- Inoue Daisuke
- Department of I. M. S. E., Kagawa University
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- Oohira Fumikazu
- Department of I. M. S. E., Kagawa University
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- Yamamoto Kazuya
- Department of I. M. S. E., Kagawa University
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- Kondo Masahiro
- Department of I. M. S. E., Kagawa University
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- Harada Takaki
- Department of I. M. S. E., Kagawa University
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- Ishimaru Ichirou
- Department of I. M. S. E., Kagawa University
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- Hashiguchi Gen
- Research Institute of Electronics Shizuoka University
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- Hosogi Maho
- Department of I. M. S. E., Kagawa University
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We have proposed a vertical comb-drive MEMS mirror which can be applied for a spectrometer with a phase-shifting method, and fabricated the mirror device using the micro fabrication technology. The configuration of the MEMS mirror was designed with three vertical electrostatic comb-drive actuators and hinges at the periphery of the mirror. In the proposed spectrometer, the phase of the light which is reflected at the movable mirror is changed, and the interferogram is obtained by the movable mirror which is driven precisely. We evaluated the moving characteristics of the fabricated MEMS mirror and confirmed that the MEMS mirror could be driven vertically to about 23μm and also could be tilted. Using this MEMS mirror, we configured the spectrometer with a source of monochromatic light (λ= 405 nm), and evaluated the spectroscopic characteristic in principle. Then, we have confirmed that the fabricated MEMS mirror can be applied to the spectrometer with the phase-shifting method.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 128 (6), 261-265, 2008
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679438502272
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- NII論文ID
- 10021135421
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 9532697
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可