Development of Micro-spectrum Analyzing Devices: Applications to Carbon Dioxide Sensor
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- Hara Hitoshi
- Yokogawa Electric Corporation
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- Kishi Naoki
- Yokogawa Electric Corporation
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- Iwaoka Hideto
- Yokogawa Electric Corporation
Bibliographic Information
- Other Title
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- マイクロ光分析デバイスの開発と二酸化炭素濃度センサへの応用
- マイクロ ヒカリ ブンセキ デバイス ノ カイハツ ト 2サンカタンソ ノウド センサ エ ノ オウヨウ
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Abstract
We have developed an infrared detector and a micro variable infrared filter for micro-spectrum analyzing devices. Two infrared detectors and the infrared filter were mounted on the identical package. A micro-spectrum analyzing device of 1cm3 volume as the two wavelength NDIR system for combining these elements with the infrared source was able to measure the concentration of carbon dioxide.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 122 (5), 274-279, 2002
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679438612992
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- NII Article ID
- 130005403949
- 10008218940
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 6152663
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed