Development of Micro-spectrum Analyzing Devices: Applications to Carbon Dioxide Sensor

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  • マイクロ光分析デバイスの開発と二酸化炭素濃度センサへの応用
  • マイクロ ヒカリ ブンセキ デバイス ノ カイハツ ト 2サンカタンソ ノウド センサ エ ノ オウヨウ

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Abstract

We have developed an infrared detector and a micro variable infrared filter for micro-spectrum analyzing devices. Two infrared detectors and the infrared filter were mounted on the identical package. A micro-spectrum analyzing device of 1cm3 volume as the two wavelength NDIR system for combining these elements with the infrared source was able to measure the concentration of carbon dioxide.

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