Transmission Modulation of Micro Retarder Using Out-of-Plane Thermally-Driven Au Nanograting
-
- Shimura Takashi
- Tokyo University of Agriculture and Technology
-
- Iwami Kentaro
- Tokyo University of Agriculture and Technology
-
- Umeda Norihiro
- Tokyo University of Agriculture and Technology
Bibliographic Information
- Other Title
-
- 面外熱駆動Auナノグレーティングを用いたマイクロ光学位相子の透過率変調
- メン ガイ ネツ クドウ Au ナノグレーティング オ モチイタ マイクロ コウガクイ アイコ ノ トウカリツ ヘンチョウ
Search this article
Description
<p>A reconfigurable transmittance modulation device for Au nanograting retarder that consisted of out-of-plane thermally-driven grating was designed, fabricated, and demonstrated. In this study, an Au nanograting that is known to exhibit giant birefringence was constituted by integrating MEMS thermal actuators. The thermally-driven grating was made of Au/SiO2 bimorph beams that period and slit width are 800 nm and 400 nm, respectively. The device is fabricated on a glass substrate with embedded Si as a sacrificial layer. The gap between the grating and the substrate is changed by applying driving current, and transmittance was changed affected by Fabry-Pérot interference. Transmittance peak wavelength for TE polarization was shifted up to 40 nm keeping the retardation of the Au nanograting. A calculation model of transmittance applying multilayer interference was proposed and demonstrated its effectiveness in TE polarization. By optimizing the design dimensions of the Au nanograting, it is expected to realize a microscale waveplate capable of transmittance modulation.</p>
Journal
-
- IEEJ Transactions on Sensors and Micromachines
-
IEEJ Transactions on Sensors and Micromachines 137 (11), 400-406, 2017
The Institute of Electrical Engineers of Japan
- Tweet
Details 詳細情報について
-
- CRID
- 1390282679438761984
-
- NII Article ID
- 130006191730
-
- NII Book ID
- AN1052634X
-
- ISSN
- 13475525
- 13418939
-
- NDL BIB ID
- 028668272
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
-
- Abstract License Flag
- Disallowed