書誌事項
- タイトル別名
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- Transmission Modulation of Micro Retarder Using Out-of-Plane Thermally-Driven Au Nanograting
- メン ガイ ネツ クドウ Au ナノグレーティング オ モチイタ マイクロ コウガクイ アイコ ノ トウカリツ ヘンチョウ
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説明
<p>A reconfigurable transmittance modulation device for Au nanograting retarder that consisted of out-of-plane thermally-driven grating was designed, fabricated, and demonstrated. In this study, an Au nanograting that is known to exhibit giant birefringence was constituted by integrating MEMS thermal actuators. The thermally-driven grating was made of Au/SiO2 bimorph beams that period and slit width are 800 nm and 400 nm, respectively. The device is fabricated on a glass substrate with embedded Si as a sacrificial layer. The gap between the grating and the substrate is changed by applying driving current, and transmittance was changed affected by Fabry-Pérot interference. Transmittance peak wavelength for TE polarization was shifted up to 40 nm keeping the retardation of the Au nanograting. A calculation model of transmittance applying multilayer interference was proposed and demonstrated its effectiveness in TE polarization. By optimizing the design dimensions of the Au nanograting, it is expected to realize a microscale waveplate capable of transmittance modulation.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 137 (11), 400-406, 2017
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679438761984
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- NII論文ID
- 130006191730
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 028668272
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可