書誌事項
- タイトル別名
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- MEMS Resonator Based Insulated Voltage Sensor Withstanding Higher Voltage
- MEMS シンドウシ オ モチイタ ゼツエンガタ デンアツ センサ ノ コウタイアツカ
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<p>The Si resonator is applied for measuring the voltage in a highly isolated manner. The working principle is based on the resonant frequency shift caused by the electrical field from the electrode connected to the high voltage source (supposing the battery). Here, the resonator is electrically floated, and its potential is decided by the relative position against the electrodes which are connected to the high voltage and the driving voltage. The induced voltage on the resonator is analyzed against the driving frequency. The resonance is found by the paired peaks in the amplitude curve. The setup for the electrical measurement can make the sensor system compact. A new sensor design for avoiding the electrical field concentration realizes the measurement over 400V without the breakdown. This will match with the high voltage DC power supply system.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 137 (8), 239-244, 2017
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679438924928
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- NII論文ID
- 130005876101
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 028463808
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可