Chemical Durability of AMLCD Glass Substrate : Corrosion of Glass Substrates by Hydrofluoric and Buffered Hydrofluoric Acids

DOI

Bibliographic Information

Other Title
  • AMLCD用ガラス基板の耐薬品性 : 特にフッ酸およびバッファードフッ酸による浸食について : 材料・部品および周辺技術関連 : 情報ディスプレイ

Description

The Chemical durability of AMLCD glass substrates was evaluated with various acids such as HCl. HNO_3, H_2SO_4, HF, buffered hydrofluoric acid (BHF), and alkali. NaOH. When treated with BHF, the surface of the glass substrates turned dim, sometimes. Microscopic obserbation revealed that the dim area corresponded to a lot of tiny hillocks. It has been concluded that there exist an effective composition of BHF as well as a recommendable cleaning condition of glass substrates to prevent the generation of tiny hillocks.

Journal

  • ITE Technical Report

    ITE Technical Report 17 (44), 25-31, 1993

    The Institute of Image Information and Television Engineers

Keywords

Details 詳細情報について

  • CRID
    1390282679497414400
  • NII Article ID
    110003678579
  • DOI
    10.11485/tvtr.17.44_25
  • ISSN
    24330914
    03864227
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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