Status and Future of Silicon Sensors and MEMS
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- ESASHI Masayoshi
- New Industry Creation Hatchery Center, Tohoku Univ.
Bibliographic Information
- Other Title
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- シリコンセンサ・MEMSの現状と将来
- 特別招待講演 シリコンセンサ・ MEMS の現状と将来
- トクベツ ショウタイ コウエン シリコン センサ MEMS ノ ゲンジョウ ト ショウライ
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Abstract
Advanced silicon sensors and MEMS(Micro Electro Mechanical Systems)have been realized based on silicon micromachining. Active catheters which move like a snake using distributed microatuators and ultrasonic imager used for the catheter have been developed. Deep RIE and XeF_2 silicon etching have been applied for precise micromachining. Electrostatically levitating micro motor was developed for the purpose of high performance gyroscope. By applying this technology ceramic micro-structures were fabricated using micromachined silicon as a mold. Capacitive AFM/SNOM probe, nanomachining to fabricate very small stylus and near field lithography to transfer nano-scale pattern have been developed.
Journal
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- ITE Technical Report
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ITE Technical Report 23.57 (0), 99-106, 1999
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Details 詳細情報について
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- CRID
- 1390282679501469184
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- NII Article ID
- 110003687249
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- NII Book ID
- AN1059086X
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- ISSN
- 24241970
- 13426893
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- NDL BIB ID
- 4867298
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- CiNii Articles
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- Abstract License Flag
- Disallowed