Status and Future of Silicon Sensors and MEMS

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Other Title
  • シリコンセンサ・MEMSの現状と将来
  • 特別招待講演 シリコンセンサ・ MEMS の現状と将来
  • トクベツ ショウタイ コウエン シリコン センサ MEMS ノ ゲンジョウ ト ショウライ

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Abstract

Advanced silicon sensors and MEMS(Micro Electro Mechanical Systems)have been realized based on silicon micromachining. Active catheters which move like a snake using distributed microatuators and ultrasonic imager used for the catheter have been developed. Deep RIE and XeF_2 silicon etching have been applied for precise micromachining. Electrostatically levitating micro motor was developed for the purpose of high performance gyroscope. By applying this technology ceramic micro-structures were fabricated using micromachined silicon as a mold. Capacitive AFM/SNOM probe, nanomachining to fabricate very small stylus and near field lithography to transfer nano-scale pattern have been developed.

Journal

  • ITE Technical Report

    ITE Technical Report 23.57 (0), 99-106, 1999

    The Institute of Image Information and Television Engineers

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