Dry etching of Gan
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- EGAWA Takashi
- Research Center for Micro-Structure Devices, Nagoya Institute of Technology
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- ISHIKAWA Hiroyasu
- Research Center for Micro-Structure Devices, Nagoya Institute of Technology
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- UMENO Masayoshi
- Research Center for Micro-Structure Devices, Nagoya Institute of Technology
Bibliographic Information
- Other Title
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- GaNのドライエッチング技術
Journal
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- Oyo Buturi
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Oyo Buturi 69 (11), 1337-1338, 2000
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390282679573088512
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- NII Article ID
- 130003594087
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- COI
- 1:CAS:528:DC%2BD3cXotFers70%3D
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- ISSN
- 21882290
- 03698009
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- Data Source
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- JaLC
- CiNii Articles