Dry etching of Gan

DOI
  • EGAWA Takashi
    Research Center for Micro-Structure Devices, Nagoya Institute of Technology
  • ISHIKAWA Hiroyasu
    Research Center for Micro-Structure Devices, Nagoya Institute of Technology
  • UMENO Masayoshi
    Research Center for Micro-Structure Devices, Nagoya Institute of Technology

Bibliographic Information

Other Title
  • GaNのドライエッチング技術

Journal

  • Oyo Buturi

    Oyo Buturi 69 (11), 1337-1338, 2000

    The Japan Society of Applied Physics

Details 詳細情報について

  • CRID
    1390282679573088512
  • NII Article ID
    130003594087
  • DOI
    10.11470/oubutsu1932.69.1337
  • COI
    1:CAS:528:DC%2BD3cXotFers70%3D
  • ISSN
    21882290
    03698009
  • Data Source
    • JaLC
    • CiNii Articles

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