書誌事項
- タイトル別名
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- The Production of the Micro-lens by means of the YAG Laser Ion Exchange Method
- YAG レーザ イオン コウカンホウ ニ ヨル マイクロ レンズ ノ サクセイ
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抄録
The ion exchange method is widely used to produce micro-lenses. Types of the ion exchange method include the sedimentation by thermo ion exchange technique, the electrolytic importation method, and the CVD method. However, all of these methods require a process involving a photo mask, and require a long production time. Thus, the laser ion exchange method was developed in which the minimum region is irradiated using a Nd-YAG laser beam. When the laser beam irradiates the minimum region. The locally irradiated part is heated to a high temperature. This method is simultaneously optical damage and ion exchange in the irradiated area. It can prepare a minute lens of approximately about 200 μm. The difference of refractive index made 2.8×10-3 maximum. This paper describes the results of research regarding the production of planar micro-lenses by means of the laser ion exchange method a using Nd-YAG laser. The evaluation of the produced lens is also described.
収録刊行物
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- 電気学会論文誌． Ａ
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電気学会論文誌． Ａ 122 (12), 1045-1051, 2002
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679575314816
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- NII論文ID
- 130005404122
- 10010455147
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- NII書誌ID
- AN10136312
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- ISSN
- 13475533
- 03854205
- http://id.crossref.org/issn/13418939
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- NDL書誌ID
- 6368804
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可