書誌事項
- タイトル別名
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- Analysis of the Electron Swarm Parameters in the positive column of Ar glow discharges by using the Boltzmann Equation
- ボルツマン ホウテイシキ オ モチイタ アルゴングロー ホウデン ヨウコウチュ
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In a previous paper, a positive columu in Ar glow discharge was analysed by a diffusion equation method and the result showed that cumulative ionization was the most dominant ionization process. Electron swarm parameters used in the analysis, however, were deduced from a Boltzmann equation method neglecting the cumulative ionization.<br>In the present paper, the electron energy distribution function and electron swarm parameters are calculated by the Boltzmann equation method considering the cumulative ionization. The number density of metastable atoms used in the calculation are deduced from the result of diffusion equation.<br>It is found that the calculated distribution function and electron swarm parameters by the present calcula-tion differ from those by the previous one at low electric field and high number density of metastable atoms. This suggests that, for the accurate analysis of a positive column in Ar glow discharge, the Boltzmann cquation method fully considered the cumulative ionization is important.
収録刊行物
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- 電気学会論文誌. A
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電気学会論文誌. A 114 (12), 853-860, 1994
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679575874048
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- NII論文ID
- 130006838957
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- NII書誌ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL書誌ID
- 3904212
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- データソース種別
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- JaLC
- NDL
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