Error Compensation of a Position Measurement System with Moving Landmarks for a Microrobot

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  • Torii Akihiro
    Dept. of Electrical and Electronics Eng., Aichi Institute of Technology
  • Inoue Toru
    Dept. of Electrical and Electronics Eng., Aichi Institute of Technology
  • Doki Kae
    Dept. of Mechanical Eng., Aichi Institute of Technology
  • Ueda Akiteru
    Dept. of Electrical and Electronics Eng., Aichi Institute of Technology

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Other Title
  • マイクロロボットのための可動灯台を用いた位置計測の誤差補正
  • マイクロ ロボット ノ タメノ カドウ トウダイ オ モチイタ イチ ケイソク ノ ゴサ ホセイ

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Abstract

Error in a position measurement system for a microrobot is described. The system consists of position sensitive detectors and moving landmarks, which are lasers on linear stages. The system requires the accurate positioning of the linear stages. The position measurement accuracy is investigated by changing the angle formed by the linear stages. In our experimental conditions, the maximum measurement error is about 0.2 mm, which is reduced to 5 μm by using the least square method.

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