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- Kumagai Hiroshi
- Keio University
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- Hatakeyama Toshiro
- Keio University
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- Nakamura Ichiro
- Keio University
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- Obara Minoru
- Keio University
Bibliographic Information
- Other Title
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- マイクロ波放電励起KrFエキシマランプの理論解析
- マイクロハ ホウデン レイキ KrF エキシマ ランプ ノ リロン カイセキ
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Abstract
We have first constructed a kinetic numerical model of the microwave-discharge-pumped KrF (B→X) excimer lamp with He and/or Ne buffer systems, so that high-efficiency lamp characteristics obtained experimentally could be theoretically explained in terms of total gas pressure and gas mixture. With this lamp model analysis, it was revealed that high intrinsic efficiency of around 10% is obtainable with He-diluted and Ne-diluted mixtures, that the mean electron energy is 4-6 eV the same as that of the conventional discharge-pumped KrF laser, and then that the dominant channel (>80%) in KrF*formation is the neutral reaction (Kr*+F2). This theoretical analysis also indicated that intrinsic efficiency improvement with two-component buffer gas mixture is due to the increase of KrF* formed via two reaction channels (Kr+F2*, Kr++F-).
Journal
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- IEEJ Transactions on Electronics, Information and Systems
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IEEJ Transactions on Electronics, Information and Systems 111 (3), 129-135, 1991
The Institute of Electrical Engineers of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679584326400
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- NII Article ID
- 130006843540
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- NII Book ID
- AN10065950
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- ISSN
- 13488155
- 03854221
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- NDL BIB ID
- 3704197
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed