書誌事項
- タイトル別名
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- Study of a Micro-miniature JT Cooler
- マイクロ ミニチュア JT クーラー ニ カンスル ケンキュウ
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説明
The micro-miniature JT cooler is a promising cooling device as an element of the micro-thermal system for semiconductor devices, which dissipate an incredible amount of heat. In particular, the thermal management of laser diodes is a serious problem because they require a large amount of power but must maintain a fixed temperature. Considering such a situation, the performance of a micro-miniature JT cooler was calculated under the assumption of a countercurrent heat exchanger operating with a laminar gas flow, and the guidelines of a micro-miniature JT cooler for optimizing pump power and size were designed from the viewpoint of minimizing the cost. The authors present the results in this paper. A micro-miniature JT cooler was fabricated from Si wafer using a photolithographic process, which is available for operation with C2H6 from 3 MPa to 0.1 MPa. It is shown that a cooling power of 2.1 W was obtained at 239 K with a mass flow of 51.7 mg/s.
収録刊行物
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- 低温工学
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低温工学 38 (12), 680-685, 2003
公益社団法人 低温工学・超電導学会 (旧 社団法人 低温工学協会)
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詳細情報 詳細情報について
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- CRID
- 1390282679591982336
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- NII論文ID
- 10012477677
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- NII書誌ID
- AN00333419
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- COI
- 1:CAS:528:DC%2BD2cXhtVSjsbk%3D
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- ISSN
- 18800408
- 03892441
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- NDL書誌ID
- 6814608
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 使用不可