Current Status and Prospects of the Femtosecond Laser Processing
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- FUJITA Masayuki
- Institute for Laser Technology Institute of Laser Engineering, Osaka University
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- IZAWA Yusaku
- Institute of Laser Engineering, Osaka University
Bibliographic Information
- Other Title
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- フェムト秒レーザー加工の現状と将来動向
- フェムトビョウ レーザー カコウ ノ ゲンジョウ ト ショウライ ドウコウ
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Description
Current status of commercialized one-box type femtosecond lasers for material processing is summarized, showing a wide variety of available pulse energy and repetition rate. Depending on the irradiated fluence, the femtosecond laser pulses give us distinctive phenomena such as ablation, LIPSS (Laser-Induced Periodic Surface Structure), phase transition of the semiconductor. In a viewpoint of industrial applications, lower manufacturing cost is generally expected for lower process fluence. Higher manufacturing speed is expected for higher average power with high repetition rate, about 100μJ pulse energy, and multiple beam output.
Journal
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- The Review of Laser Engineering
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The Review of Laser Engineering 36 (5), 257-262, 2008
The Laser Society of Japan
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Details 詳細情報について
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- CRID
- 1390282679623203968
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- NII Article ID
- 10021105726
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- NII Book ID
- AN00255326
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- COI
- 1:CAS:528:DC%2BD1cXnvVSmtbk%3D
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- ISSN
- 13496603
- 03870200
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- NDL BIB ID
- 9520869
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed