書誌事項
- タイトル別名
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- Current Status and Prospects of the Femtosecond Laser Processing
- フェムトビョウ レーザー カコウ ノ ゲンジョウ ト ショウライ ドウコウ
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説明
Current status of commercialized one-box type femtosecond lasers for material processing is summarized, showing a wide variety of available pulse energy and repetition rate. Depending on the irradiated fluence, the femtosecond laser pulses give us distinctive phenomena such as ablation, LIPSS (Laser-Induced Periodic Surface Structure), phase transition of the semiconductor. In a viewpoint of industrial applications, lower manufacturing cost is generally expected for lower process fluence. Higher manufacturing speed is expected for higher average power with high repetition rate, about 100μJ pulse energy, and multiple beam output.
収録刊行物
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- レーザー研究
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レーザー研究 36 (5), 257-262, 2008
一般社団法人 レーザー学会
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詳細情報 詳細情報について
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- CRID
- 1390282679623203968
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- NII論文ID
- 10021105726
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- NII書誌ID
- AN00255326
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- COI
- 1:CAS:528:DC%2BD1cXnvVSmtbk%3D
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- ISSN
- 13496603
- 03870200
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- NDL書誌ID
- 9520869
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
