New and Promising Materials from Nitride Compounds. 3. Properties and applications of Super Hard TiN Films.
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- 長坂 浩志
- (株)荏原総合研究所
Bibliographic Information
- Other Title
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- 窒素化合物のもたらす新素材 ３ 超硬質ＴｉＮ膜の特性と応用
- 3 チョウ コウシツ TiN マク ノ トクセイ ト オウヨウ
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Journal
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- The Journal of The Institute of Electrical Engineers of Japan
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The Journal of The Institute of Electrical Engineers of Japan 119 (12), 749-751, 1999
The Institute of Electrical Engineers of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679638221568
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- NII Article ID
- 10004296460
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- NII Book ID
- AN10432927
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- ISSN
- 18814190
- 13405551
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- NDL BIB ID
- 4923982
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles