CF4 Decomposition Using Low-Pressure Pulse-Modulated Radio Frequency Plasma
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- KUROKI Tomoyuki
- Department of Mechanical Engineering, Osaka Prefecture University
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- TANAKA Shingo
- Sumitomo Chemical Co., Ltd.
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- OKUBO Masaaki
- Department of Mechanical Engineering, Osaka Prefecture University
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- YAMAMOTO Toshiaki
- Department of Mechanical Engineering, Osaka Prefecture University
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CF4 is one of the most stable gases among perfluorocompounds (PFCs) whose decomposition is extremely difficult. In this study, CF4 decomposition was investigated using a pulse-modulated radio frequency (RF) plasma of 2MHz, which is applicable to plasma etching and novel functional material manufacturing processes. When the absolute pressure and 100% CF4 and 99.5% O2 flow rates were set at 80Pa and 0.1 and 0.2NL/min, respectively, almost complete CF4 decomposition was achieved at the pulse modulation frequency range of 25kHz to 99kHz. The analysis of the by-product of CF4 decomposition was carried out using a CO2 gas analyzer and a Fourier transform infrared spectrophotometer (FTIR) with a pulse modulation frequency of 75kHz. It was known that 10%, 50% and 24% of CF4 are converted to CO, CO2 and COF2, respectively. It was considered that the remaining 16% of carbon is converted to carbon particles or other organic substances.
収録刊行物
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- JSME International Journal Series B Fluids and Thermal Engineering
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JSME International Journal Series B Fluids and Thermal Engineering 48 (3), 440-447, 2005
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390282679653233536
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- NII論文ID
- 110004820203
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- NII書誌ID
- AA10888815
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- COI
- 1:CAS:528:DC%2BD2MXhtFeks7jF
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- ISSN
- 13475371
- 13408054
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- NDL書誌ID
- 7387136
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 使用不可