ヘテロダイン応用モアレ法による真直度の測定

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書誌事項

タイトル別名
  • Straightness measurement using heterodyne moire method.
  • ヘテロダイン オウヨウ モアレホウ ニ ヨル シンチョクド ノ ソクテイ

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説明

Heterodyne moiré method is applied to the displacement measurement of the interference fringes, which act as the normal lines in the straightness measurement. As the phase difference of the moiré fringes is detected that are transformed into time frequency by the tranferring reference grating with a constant speed, the measurement is done with short time and high accuracy, and also continuously. Further, it is confirmed that the flutter of the laser beam can be controlled by sending the air flow to the beam.

収録刊行物

  • 精密機械

    精密機械 51 (5), 984-989, 1985

    公益社団法人 精密工学会

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