超精密位置制御に関する研究　粗・微動の連動制御

DOI Web Site 被引用文献3件

書誌事項

タイトル別名
  • Experimental Studies on Ultra-precision Positioning. Inchworm Movement Method using Fine and Coarse Positionings.
  • チョウ セイミツ イチギメ セイギョ ニ カンスル ケンキュウ ソ ビドウ ノ
  • Inchworm Movement Method using Fine and Coarse Positionings
  • 粗・微動の連動制御

この論文をさがす

説明

This work was carried out to develop a precision dual positioning apparatus, consisting of friction drive and piezoelectric actuator. In this apparatus, the piezoelectric actuator, designed for fine positioning, is mounted on top of the friction drive slide, designed for coarse positioning. Individual loops are closed by laser interferometer systems, with 2.5 nm resolution. The friction drive and piezoelectric actuator move together, using a kind of inchworm movement method, which the authors have proposed. The method makes it possible for this positioning system to have an over 100 mm stroke with 2.5 nm resolution and no backlash. In addition, this dual positioning system, using the inchworm movement method, is also valid for assuring a tool's continuous path (CP) control, with nanometer order accuracies, in forming three-dimensional surfaces, using a precision machine (precision lathe).

収録刊行物

  • 精密工学会誌

    精密工学会誌 57 (12), 2133-2138, 1991

    公益社団法人 精密工学会

被引用文献 (3)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ