書誌事項
- タイトル別名
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- Fabrication of Micro Structures using Thin Film Metallic Glass. Proposal and Fabrication of a Micro Electrostatic Actuator of Thin Film Metallic Glass.
- ハクマク キンゾク ガラス オ モチイタ ビサイ コウゾウブツ ノ セイサク(ダイ2ホウ)ハクマク キンゾク ガラス セイデンマイクロアクチュエータ ノ テイアン ト シサク
- Proposal and Fabrication of a Micro Electrostatic Actuator of Thin Film Metallic Glass
- 薄膜金属ガラス静電マイクロアクチュエータの提案と試作
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This paper presents a new type of electrostatic actuator (Conical Spring Linear Actuator : CSLA) capable of vertical stepwise motion to a substrate. The CSLA is made of a thin film metallic glass (TFMG) of a conical spring shape. The TFMG is expected to be a material suitable for micro structures because it is an amorphous alloy which free from anisotropy and defects originating from the crystal structure. Micro machining of TFMG is possible by a lift-off technique. Moreover TFMG softens at a certain temperature range called the supercooled liquid state, which allows surface micro-machined TFMG structures to be easily formed into three-dimensional shapes. This micro forming technique allows the conical spring shape of the CSLA. The conical spring acting as a moving electrode was assembled on a fixed four-section electrode on the substrate so that the actuator could make a stepwise motion. The CSLA showed vertical stepwise motion of four stages to the substrate by switching the electrodes, which were applied in rotation at a constant voltage (17V). The total displacement of the CSLA was limited to 30μm due to the unexpected deformation of the conical spring.
収録刊行物
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- 精密工学会誌
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精密工学会誌 66 (2), 287-291, 2000
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390282679741650176
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- NII論文ID
- 10006916015
- 110001372882
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 4985900
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可