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- SUZAKI Yoshifumi
- 正会員 高松工業高等専門学校高機能化技術教育研究センター
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- NAKAMURA Shigeaki
- 高松工業高等専門学校高機能化技術教育研究センター
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- KAKIUCHI Hiroaki
- 正会員 大阪大学工学部
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- YOSHII Kumayasu
- 正会員 大阪大学工学部
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- KAWABE Hideaki
- 正会員 大阪大学工学部
Bibliographic Information
- Other Title
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- スパッタ法により作製したa‐Si/a‐SiC超格子薄膜の構造
- スパッタホウ ニ ヨリ サクセイシタ a Si a SiC チョウコウシ ハク
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Abstract
Amorphous silicon/amorphous silicon carbide (a-Si/a-SiC) multilayer films are prepared by a dual rf magnetron sputtering method. The multilayer structure is confirmed by a depth profile of Auger electron spectroscopy (AES). Difference in the etch rate of amorphous silicon and amorphous silicon carbide in a mixture of HF, HNO3 and CH3COOH creates series of concentric steps in multilayer films, that show up clearly in the observation by an optical microscope. Furthermore, a small angle X-ray diffraction is carried out in order to be clarified the periodic structure. In the [a-Si (14.1 nm)/ a-SiC(7.5 nm)]30 film with its superstructure period Λ =21.6 nm, from 1st to 23rd Bragg reflections caused by the regular periodicity can be observed. The diffraction profile has been well explained by a l-dimensional step model, which takes into account a random distribution of the superstructure period, varying according to a Gaussian distribution with the width ΔΛ/Λ =0.3 % (ΔΛ =0.064 nm).
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 60 (1), 138-142, 1994
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390282679741751296
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- NII Article ID
- 110001371496
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 3864143
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed