書誌事項
- タイトル別名
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- Profile Measurement using Abramson Interferometer by One-Step Phase Shifting Method.
- ワンステップ イソウ シフトホウ オ モチイタ アブラムソン カンショウケイ
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説明
An Abramson interferometer has been known as one type of oblique incidence interferometers. It can record an interferogram for rough or uneven nonoptical surfaces. However for a fringe analysis, a conventional multi-step phase shifting method has difficulties in applying to this interferometer because of quasi-common path arrangement in optics. For the solution of this problem, the Abramson interferometry using a one-step phase shifting method is proposed. For practical applications, two problems are overcome in this interferometer, elimination of the influence of multi-reflection and decreasing of error due to deviation from the reference carrier frequency are proposed in this one-step phase shifting method. A spatial filter is set up in optics and a revised algorithm in one-step phase shifting method is proposed. An experiment is made for demonstrating availability of this method using a Si wafer.
収録刊行物
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- 精密工学会誌
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精密工学会誌 64 (9), 1380-1384, 1998
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390282679742155392
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- NII論文ID
- 10016090088
- 10008501349
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 4556297
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- 本文言語コード
- ja
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