Angle Sensor with STM. (2nd Report). Atom Tracking and Yaw Measurement.
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- SAKUTA Shigeru
- (株)東芝生産技術研究所
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- Youcef-TOUMI Kamal
- MIT Laboratory for Manufacturing and Productivity
Bibliographic Information
- Other Title
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- STMを用いた超精密角度センサ (第2報) 原子頂点の追跡とヨーイング測定
- STM オ モチイタ チョウ セイミツ カクド センサ ダイ 2ホウ ゲンシ
- -Atom Tracking and Yaw Measurement-
- -原子頂点の追跡とヨーイング測定-
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Abstract
In the previous report, the authors proposed a new type of angle sensor with three tracking STM tips, which offers a real-time measurement of pitch, roll and yaw with nano-radian resolution. The purpose of this paper is to describe an atom tracking to measure yaw. The fundamental experiment, in which one tip tracks an atom peak of graphite, shows that the tip searches the atom peak by tip rotation with the radius of less than 0.1 nm. Yaw is measured with nano-radian resolution by having the tip track the atom peak.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 63 (6), 807-811, 1997
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390282679742527488
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- NII Article ID
- 110001367839
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 4227400
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed