Preparation of Ceramic Micro Parts by Grinding.

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  • 微小セラミックス部品の研削加工
  • ビショウ セラミックス ブヒン ノ ケンサク カコウ

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In this paper, the application of grinding to process ceramic micro parts has been discussed. A compact size NC grinding machine was developed using a spindle electrically driven up to 40000 rpm and stages move every 1 rim pitch. Electroplated grinding wheels of 1.5 and 10 mm in diameter are prepared with diamond abrasives of #120, #325 and #800. The specifications of a grinding wheel and the grinding conditions to minimize grinding force and surface roughness of workpieces have been examined. As a result. when the #800 grinding wheel of 5 mm in diameter has been used. 2 mm long micro poles of alumina, silicon nitride and zirconia. of which diameters are 60 μm. 150 μm and 25 μm respectively. and 2 mm long micro shoulder pole and quadrilateral pole of zirconia have been obtained.

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