Precise measurement of linear displacement by spatial phase detection.

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  • 空間的位相検出法による高精度変位測定
  • クウカンテキ イソウ ケンシュツホウ ニ ヨル コウ セイド ヘンイ ソクテイ

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Linear displacement in the range of millimeter to nanometer is determined by measuring phase variation of a one-dimensional periodic pattern such as a Ronchi grating, moiré fringes, and interference fringes. Phase variation is precisely determined by sinusoidal fitting whose algorithm is the same as that of phase detection which is well-known in communication techniques. Hardware system is quite simple which consists of a linear image sensor, a general purpose microcomputer, and required peripheral interface circuits. Errors inherent in the method is discussed in detail. Phase errors experimentally obtained in a Ronchi grating, moiré fringes, and interference fringes are 0.029 rad, 0.057 rad, and 0.068 rad, respectively.

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