Study for Development of Nano-Machining and Measurement System of Machining Center Type
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- INAGAKI Kiyonori
- 立山マシン(株)
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- MORITA Noboru
- 富山大学工学部
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- ASHIDA Kiwamu
- (独)産業技術総合研究所
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- SAITO Jyunji
- 立山マシン(株)
Bibliographic Information
- Other Title
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- マシニングセンタ型ナノ加工・計測システムの開発に関する研究
- マシニング センタガタ ナノ カコウ ケイソク システム ノ カイハツ ニ カンスル ケンキュウ
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Abstract
A small precision nanomachining and measurement system was developed with a targeted machining resolution on the order of scales ranging from submicrons to several nanometers. The system was comprised of two machining functions, scratch machining and milling, and one measurement function. The scratch machining function was based on a frictional force microscope mechanism with a closed-loop numerical control (NC) to control the depth of the cut. A stiff cantilever was used for the scratch-machining function to permit nanomachining of hard and brittle materials such as silicon. The milling function used an original miniature tool that had a very small diamond mounted on it that permitted micromachining. The measurement function incorporated into this system used the same mechanism as the scratch-machining function, and provided a degree of precision almost equal to that of atomic force microscopy. After constructing this system, we performed various machining tests with it to confirm that the integrated NC closed-loop control function performed correctly.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 74 (11), 1176-1181, 2008
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390282679773108096
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- NII Article ID
- 110006990556
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 9710903
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed