Nanoscale measurement of whole cylinder surface using a laser microscope with a wide field of view

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Other Title
  • 広視野レーザ顕微鏡による円筒面全面のナノスケール計測

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Description

In a previous study, we developed a new method for observation of the whole cylindrical surface in a very short time,using a laser microscope with a wide field of view. When cylindrical specimens were rotated by a motor-driven rotary table, the focused laser light was scanned along a generatrix of the cylinder surface. Thus, the whole cylinder surface could be observed easily even over a very short time. As the obtained image was a developed view of the cylinder surface, it was easy to measure the distance between any two points on the cylindrical surface. In this study, we acquired interference images of the whole cylinder surface with the aid of a reference plane. As a result, fringe patterns over the whole cylinder surface could be obtained. From image processing of the fringe patterns, we calculated the nanoscale surface profile of the cylinder.

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Details 詳細情報について

  • CRID
    1390282679805585664
  • NII Article ID
    130005084687
  • DOI
    10.2493/jjspe.81.699
  • ISSN
    1882675X
    09120289
  • Text Lang
    ja
  • Article Type
    journal article
  • Data Source
    • JaLC
    • Crossref
    • CiNii Articles
    • KAKEN
  • Abstract License Flag
    Disallowed

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