低周波音響信号利用による微細穴検査技術

DOI DOI Web Site 被引用文献1件 オープンアクセス

書誌事項

タイトル別名
  • Micro-Hole Inspection System Using Low-Frequency Sound
  • —Effects of Loudspeaker Frequency on Inspection Resolution—
  • —検査に使用する周波数と検査分解能の関係—

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説明

This paper presents a method for non-destructive inspecting micro-holes with diameters of less than 100μm by using audible sound. Fluid flow through micro-holes affects the performance of a product. Therefore, if the flow rate of fluid passing through micro-holes could be accurately assessed by means of an inspection system, it would be possible to guarantee the performance of the product. By using a low frequency sound in micro-hole inspection, it is possible to measure the hole diameter differences of 1μm when hole diameter is 100μm. In addition, the experimental results show that, by setting the appropriate frequency, it is possible to measure faster than conventional inspection method.

収録刊行物

  • 精密工学会誌

    精密工学会誌 80 (11), 1023-1030, 2014

    公益社団法人 精密工学会

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